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Local Defectivity Control of 2D Self‐Assembled Block Copolymer Patterns
Local Defectivity Control of 2D Self‐Assembled Block Copolymer Patterns
2007
Ricardo Ruiz
Niranjana Ruiz
Y. Zhang
Robert L. Sandstrom
Charles T. Black
Keywords:
Nanolithography
Nanotechnology
Self-assembly
Materials science
Copolymer
self assembled
Correction
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