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Defect, Dopant, and Device Modification using Si(Ge,B) Epitaxy
Defect, Dopant, and Device Modification using Si(Ge,B) Epitaxy
1989
Ga Rozgonyi
Rr Kola
K. E. Bean
K. Lindberg
Keywords:
Dopant
Isotropic etching
Crystallography
Epitaxy
Materials science
Optoelectronics
Correction
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