Old Web
English
Sign In
Acemap
>
Paper
>
RF Performance Boosting for 40nm-node CMOS Device by Low-k/Cu Dual Damascene Contact
RF Performance Boosting for 40nm-node CMOS Device by Low-k/Cu Dual Damascene Contact
2009
J. Kawahara
Kenichiro Hijioka
I. Kume
H. Nagase
A. Tanabe
Makoto Ueki
H. Yamamoto
T Fukai
Koji Arita
K. Motoyama
Ryohei Kitao
K. Fujii
M Ikeda
Yasuhide Hayashi
Keywords:
Boosting (machine learning)
Copper interconnect
CMOS
Electronic engineering
Materials science
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]