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Development of a Planarization Process for the Fabrication of Nanocrystalline Diamond Based Photonic Structures
Development of a Planarization Process for the Fabrication of Nanocrystalline Diamond Based Photonic Structures
2019
Julia Heupel
Nina Felgen
Rolf Merz
Michael Kopnarski
Johann Peter Reithmaier
Cyril Popov
Keywords:
Diamond
Nanotechnology
Condensed matter physics
Photonics
Chemical-mechanical planarization
Fabrication
Nanocrystalline material
Physics
nanocrystalline diamond
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