Homogeneous superconducting phase in TiN film: A complex impedance study

The low frequency complex impedance of a high resistivity 92 μ Ω cm and 100 nm thick TiN superconducting film has been measured via the transmission of several high sensitivity GHz microresonators, down to TC/50. The temperature dependence of the kinetic inductance follows closely BCS local electrodynamics, with one well defined superconducting gap. This evidences the recovery of a homogeneous superconducting phase in TiN far from the disorder and composition driven transitions. Additionally, we observe a linearity between resonator quality factor and frequency temperature changes, which can be described by a two fluid model.