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Two-step Poly-Si Through-silicon via for High-temperature Process of Bioprobe
Two-step Poly-Si Through-silicon via for High-temperature Process of Bioprobe
2018
Taiki Yasui
Shota Yamagiwa
Hiroshi Kubo
Shinnosuke Idogawa
Yoshihiro Kubota
Takeshi Kawano
Keywords:
Vapor–liquid–solid method
Analytical chemistry
Through-silicon via
Engineering
two step
Nanotechnology
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