Old Web
English
Sign In
Acemap
>
Paper
>
Evolution of Dual-Layer Patterning Film for Lithography Applications
Evolution of Dual-Layer Patterning Film for Lithography Applications
2013
Qinglin Chai
Xudong Liang
Yingjie Chen
Xianyuan Li
Ganming Zhao
Keywords:
Nanotechnology
Lithography
Multiple patterning
Materials science
Next-generation lithography
dual layer
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]