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Epitaxial growth of NiO thin films by RF reactive magnetron sputtering for the investigation of defect properties
Epitaxial growth of NiO thin films by RF reactive magnetron sputtering for the investigation of defect properties
2020
Keisuke Nishimoto
Joonam Kim
Mutsumi Sugiyama
Keywords:
Thin film
reactive magnetron
Sputtering
Non-blocking I/O
Materials science
Optoelectronics
Epitaxy
Correction
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