Highly ordered anodic porous oxides of transition metals fabricated by anodization combined with a pretexturing process

Abstract In this study, highly ordered anodic porous metal oxides of transition metals (W, Fe, Co, and Nb) were prepared by anodization combined with a pretexturing process. The formation of an array of dimples on the metal surface was achieved by dry etching using ordered anodic porous alumina as a mask. Subsequent anodization of the pretextured metals generated metal oxides (WO3, Fe2O3, Co3O4, and Nb2O4) with an ordered hole array structure because each dimple acted as a starting point for hole development. The hole periodicity of the resulting ordered anodic porous metal oxide could be controlled by changing the periodicity of the dimples formed on the substrate. Ordered anodic porous films obtained by this process could be used in various functional devices that require ordered hole array structures.