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Materials and processes and high resolution patterning using thermal cantilever array lithography
Materials and processes and high resolution patterning using thermal cantilever array lithography
2005
Clifford L. Henderson
William Paul King
Yueming Hua
Shubham Saxena
Keywords:
X-ray lithography
Nanotechnology
Cantilever
Lithography
Next-generation lithography
Multiple patterning
Materials science
Thermal
high resolution
Correction
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