Stable, ruggedized, and nanometer-order size transfer mold field emitter array in harsh oxygen radical environment

Extremely sharp, uniform, stable, rugged, low operating voltage, and nanometer size molybdenum field emitter arrays (Mo FEAs) were developed by transfer mold fabrication. These can be used in stable and reliable vacuum nanoelectronic devices such as those used in electric propulsion engines and in environmentally demanding applications. Nanometer size transfer mold Mo FEAs were fabricated with base lengths of 36–370 nm. The 36 nm base length transfer mold Mo FEAs are the smallest FEA's ever reported. The tip radii were as sharp as 2.8–3.5 nm. The turn-on fields of the transfer mold Mo FEAs with a base length of 36–370 nm were found to be as low as 9.0–23.6 V/μm for the short anode-to-apex distance of less than 10 μm. These are lower than those of conventional FEA's such as carbon nanotube FEAs, Spindt-type FEAs, and Gray-type FEAs with approximate turn-on fields of 50–600 V/μm. They can thus be used in reliable vacuum nanoelectronic devices. The emission fluctuation of the 36 nm base length transfer mold ...