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Influence of type of gas on the properties of SiOx coatings by cold atmospheric plasma
Influence of type of gas on the properties of SiOx coatings by cold atmospheric plasma
2019
H. Hamze
Maude Jimenez
D. Deresmes
A. Beaurain
Nicolas Nuns
Michel Traisnel
Keywords:
Atmospheric-pressure plasma
Materials science
Chemical engineering
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