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Comparative studies of metal-organic decomposed GaxCeyOz and CeO2 based functional MOS capacitor
Comparative studies of metal-organic decomposed GaxCeyOz and CeO2 based functional MOS capacitor
2021
Kar Yeow Tan
Puteri Haslinda Megat Abdul Hedei
Ainita Rozati Mohd Zabidi
Farah Hayati Ahmad
Kammutty Musliyarakath Abdul Shekkeer
Khai Shenn Lau
Way Foong Lim
Zainuriah Hassan
Hock Jin Quah
Keywords:
mos capacitor
Metal
Chemical engineering
Gallium
Spin coating
Cerium oxide
Materials science
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