Laser annealing in ion‐implanted garnets

H+ ion‐implanted garnet films with a composition of (Y, Sm, Lu, Ca)3 (Fe, Ge)5O12 have been laser annealed in ambient air. Annealed films were studied using ferromagnetic resonance (FMR) and X‐ray techniques. A thermal model is proposed suitable with the experimental data. Emphasis on the differences of the laser annealing compared to a classical furnace annealing are presented. Hydrogen trapping has been observed to result from the high velocity of the quenching process.