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FIB direct fabrication of sub-10 nm synthetic nanopores
FIB direct fabrication of sub-10 nm synthetic nanopores
2011
J. Gierak
A. Madouri
Eric Le Bourhis
J. Y. Marzin
G. Oukhaled
Laurent Bacri
Benjamin Cressiot
Juan Pelta
Ralf Jede
L. Bruchhaus
Lo "Ic Auvray
Keywords:
Nanotechnology
Nanopore
Materials science
Fabrication
Correction
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