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Effect of substrate temperature on the properties of aluminum doped zinc oxide by DC magnetron sputtering
Effect of substrate temperature on the properties of aluminum doped zinc oxide by DC magnetron sputtering
2005
Hong-Mo Koo
Se Hyun Kim
Yeon-Keon Moon
Jong-Wang Park
Chang Ho Jeong
Keywords:
Substrate (chemistry)
Materials science
Chemical engineering
Sputter deposition
aluminum doped zinc oxide
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