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Application of aluminum nitride thin film for micromachined ultrasonic transducers
Application of aluminum nitride thin film for micromachined ultrasonic transducers
2006
Qianghua Wang
Jianzeng Xu
Changhe Huang
Gregory W. Auner
Keywords:
Thin film
Aluminium
Capacitive micromachined ultrasonic transducers
Ultrasonic sensor
Nitride
Composite material
Materials science
Optoelectronics
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