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Fabrication of Metal/Graphene Hybrid Interconnects by Direct Graphene Growth and Their Integration Properties
Fabrication of Metal/Graphene Hybrid Interconnects by Direct Graphene Growth and Their Integration Properties
2018
Chang-Seok Lee
Keunwook Shin
Hyun-jae Song
Hyun Park
Yeonchoo Cho
Dong-Hyun Im
Hyangsook Lee
Jaeho Lee
Jung-Yeon Won
Jae Gwan Chung
Chang-Hyun Kim
Kyung-Eun Byun
Eun-Kyu Lee
Yongsung Kim
Wonhee Ko
HanJin Lim
Seong-Jun Park
Hyeon-Jin Shin
Keywords:
Graphene
Nanotechnology
Metal
Materials science
Fabrication
Correction
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