Method for manufacturing silicone micro-nano optical structure by using imprinting technology

The invention discloses a method for manufacturing a silicone micro-nano optical structure by using an imprinting technology. Firstly, a template serving as a seal during the imprinting is designed and processed according to the requirements of the structure of a device; secondly, an appropriate substrate material is selected and used according to the requirements of the micro-nano optical structure of the device, and then covered with imprinting glue; afterwards, structural patterns on the template are transferred to the imprinting glue by adopting an imprinting process, the imprinting glue is solidified and molded, the template is released after the template and the substrate are both cooled, and then a micro-nano optical structure with embossed figures is obtained; and finally, a polymeric optical bounding layer covers above imprinted lines according to the design of the device, and then the whole micro-nano optical structure is formed. By adopting the method, optical devices whichhave good weatherability and strong thermal stability and cause low loss can be prepared; and besides, the process is simple, so that the method has a cost advantage.