Old Web
English
Sign In
Acemap
>
Paper
>
Hydrogen effects on AlGaN/GaN MISFET with LPCVD-SiNx gate dielectric
Hydrogen effects on AlGaN/GaN MISFET with LPCVD-SiNx gate dielectric
2019
Zhiyuan He
Yiqiang Chen
Jiang He
Wei Su
Wenxiao Fang
Yunfei En
Yun Huang
Yang Liu
Keywords:
Condensed matter physics
Gate dielectric
MISFET
Hydrogen
Chemical vapor deposition
Optoelectronics
Chemistry
algan gan
Correction
Source
Cite
Save
Machine Reading By IdeaReader
31
References
2
Citations
NaN
KQI
[]