Comparative study of textured and epitaxial ZnO films

Abstract ZnO films were synthesized by pulsed laser deposition (PLD) on GaAs and α-Al 2 O 3 substrates. The properties of ZnO films on GaAs and α-Al 2 O 3 have been investigated to determine the differences between epitaxial and textured ZnO films. ZnO films on GaAs show very strong emission features associated with exciton transitions as do ZnO films on α-Al 2 O 3 , while the crystalline structural qualities for ZnO films on α-Al 2 O 3 are much better than those for ZnO films on GaAs. The properties of ZnO films are studied by comparing highly oriented, textured ZnO films on GaAs with epitaxial ZnO films on α-Al 2 O 3 synthesized along the c -axis.