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New Observation of NBTI Degradation and Recovery Effect of Plasma Nitrided Oxide in Nano Scale PMOSFET's
New Observation of NBTI Degradation and Recovery Effect of Plasma Nitrided Oxide in Nano Scale PMOSFET's
2007
In-Shik Han
Hee-Hwan Ji
Tae-Gyu Goo
Ook-Sang You
Won-Ho Choi
Min-Ki Na
Ga Won Lee
Yong-Goo Kim
Sung-Hyung Park
Heui-Seung Lee
Young-Seok Kang
Dae-Byung Kim
Hi-Deok Lee
Keywords:
Recovery effect
Plasma
Oxide
Nanoscopic scale
Nitriding
Analytical chemistry
Materials science
Chemical engineering
Degradation (geology)
Correction
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