A thin-film solar cell of high-quality β-FeSi2/Si heterojunction prepared by sputtering

Abstract High-quality (1 1 0)/(1 0 1)-oriented epitaxial β -FeSi 2 films were fabricated on Si (1 1 1) substrate by the sputtering method. The critical feature was the formation of a high-quality thin β -FeSi 2 template buffer layer on Si (1 1 1) substrate at low temperature. It was demonstrated that the template is very important for the epitaxial growth of thick β -FeSi 2 films and for the blocking of Fe diffusion into the Si at the β -FeSi 2 /Si interface. Hall effect measurements for β -FeSi 2 films showed n-type conductivity, with residual electron concentration around 2.0 × 10 17  cm −3 and mobility of 50–400 cm 2 /V s. A prototype thin-film solar cell was fabricated by depositing n- β -FeSi 2 on p-Si (1 1 1). Under 100 mW/cm 2 sunlight, an energy conversion efficiency of 3.7%, with an open-circuit voltage of 0.45 V, a short-circuit current density of 14.8 mA/cm 2 and a fill factor of 0.55, was obtained.