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2104 Hybrid quantum-classical simulation of wafer bonding of nano-sized Si parts
2104 Hybrid quantum-classical simulation of wafer bonding of nano-sized Si parts
2012
Tatsunori Hattori
Takahisa Kono
Tomoyuki Tamura
Ryo Kobayashi
Shuji Ogata
Keywords:
Anodic bonding
Nano-
Quantum
Wafer bonding
Materials science
Composite material
Nanotechnology
nano sized
Correction
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