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Electromagnetic (EM) and Electric Asymmetry (EA) Effects in Dual Frequency Collisional Nitrogen Capacitive Discharges
Electromagnetic (EM) and Electric Asymmetry (EA) Effects in Dual Frequency Collisional Nitrogen Capacitive Discharges
2021
Emi Kawamura
Michael A. Lieberman
Pascal Chabert
Allan J. Lichtenberg
Keywords:
dual frequency
Asymmetry
Physics
Atomic physics
Nitrogen
Capacitive sensing
Correction
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