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Y. Hosokawa
Y. Hosokawa
University of Tokyo
Chemical vapor deposition
Amorphous silicon
Optics
Plasma-enhanced chemical vapor deposition
Carbide
1
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Low-temperature growth of polycrystalline SiC by catalytic CVD from monomethylsilane
2006
Microelectronic Engineering
T Kaneko
Y. Hosokawa
T. Suga
N. Miyakawa
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Citations (17)
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