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T. Uhrmann
T. Uhrmann
EV Group
Resist
Lithography
Materials science
Computer science
Optoelectronics
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Maskless Lithography Optimized for Heterogeneous and Chiplet Integration
2020
B. Matuskova
B. Povazay
R. Holly
F. Bogelsack
Tobias Zenger
T. Uhrmann
B. Thallner
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Ultra-thin polymer spray coating for advanced adhesive bonding applications
2019
EMPC | European Microelectronics and Packaging Conference
B. Matuskova
J. Gasiorowski
J. Rimbock
T. Zenger
M. Eibelhuber
T. Uhrmann
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Advanced Black Resist Processing and Optimized Lithographic Patterning for Novel Photonic Devices
2019
B. Matuskova
H. Taguchi
M. Weinhart
R. Holly
M. Brunnbauer
J. Rimbock
T. Zenger
M. Eibelhuber
T. Uhrmann
Y. Taguchi
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