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ChangAn Wang
ChangAn Wang
ASML Holding
Metrology
Computer science
Calibration
Electronic engineering
Photochemistry
4
Papers
1
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0
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2024
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Stochastic defect criticality prediction enabled by physical stochastic modeling and massive metrology
2021
ChangAn Wang
Peigen Cao
Maxence Delorme
Jen-Yi Wuu
Jiyou Fu
Fuming Wang
Bob Lin
Yiqiong Zhao
Yi-Hsing Peng
Fan Yongfa
Mu Feng
Bin Cheng
Jen-Shiang Wang
Mark Simmoms
Stefan Hunsche
Oliver D. Patterson
Kuo-Feng Pao
Abdalmohsen Elmalk
Kevin Gao
Ruochong Fei
Xuefeng Zeng
Xiaolong Zhang
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Contour-based variability decomposition for stochastic band metrology
2021
Wallow Thomas I
Jiyou Fu
Jiao Liang
Jen-Shiang Wang
Jimmy Fan
Maxence Delorme
ChangAn Wang
Fahong Li
Vivek Kumar Jain
Rui Yuan
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Compact modeling of negative tone development resist with photo decomposable quencher
2019
Ao Chen
Kar Kit Koh
Yee Mei Foong
Bradley Morgenfeld
Jun Chen
Sandra Lee
Xi Chen
Hesham Omar
Mu Feng
ChangAn Wang
Keith Gronlund
Jun Lang
James Guerrero
Yiqiong Zhao
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Massive metrology using fast e-beam technology improves OPC model accuracy by >2x at faster turnaround time
2018
Qian Zhao
Lei Wang
Jazer Wang
ChangAn Wang
Hong-Fei Shi
James Guerrero
Mu Feng
Qiang Zhang
Jiao Liang
Yunbo Guo
Chen Zhang
Tom Wallow
David Rio
Lester Wang
Alvin Wang
Jen-Shiang Wang
Keith Gronlund
Jun Lang
Kar Kit Koh
Dongqing Zhang
Hongxin Zhang
Subramanian Krishnamurthy
Ray Fei
Chiawen Lin
Wei Fang
Fei Wang
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