Old Web
English
Sign In
Acemap
>
authorDetail
>
Takaaki Tanaka
Takaaki Tanaka
Hitachi
Oxide
Polishing
Nano-
Slurry
Calcination
2
Papers
1
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Nano size cerium hydroxide slurry for scratch-free CMP process
2014
Takaaki Tanaka
Hisataka Minami
Toshiaki Akutsu
Tomohiro Iwano
Takahiro Hidaka
Takashi Shinoda
Haruaki Sakurai
Shigeru Nobe
Show All
Source
Cite
Save
Citations (1)
Liquide de polissage pour film métallique et procédé de polissage
2008
Takaaki Tanaka
Masato Fukasawa
Shigeru Nobe
Takafumi Sakurada
Takashi Shinoda
Show All
Source
Cite
Save
Citations (0)
1