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Tomohiro Iwano
Tomohiro Iwano
Hitachi
Oxide
Polishing
Nano-
Slurry
Calcination
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Nano size cerium hydroxide slurry for scratch-free CMP process
2014
Takaaki Tanaka
Hisataka Minami
Toshiaki Akutsu
Tomohiro Iwano
Takahiro Hidaka
Takashi Shinoda
Haruaki Sakurai
Shigeru Nobe
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