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Toshio Sawano
Toshio Sawano
Fujitsu
Engineering
Electronic engineering
Optics
Point spread function
Linear approximation
3
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2
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Poly-width-modification method for canceling layout-dependent characteristic variations for low-standby-power CMOS technologies
2009
ASMC | Advanced Semiconductor Manufacturing Conference
Satoshi Nakai
Kazushi Fujita
Takayoshi Minami
Junichi Mitani
Toshio Sawano
Tatsuo Chijimatsu
Tatsuya Deguchi
Satoru Asai
Masato Suga
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In-line-focus monitoring technique using lens aberration effect
2005
Tomohiko Yamamoto
Toshio Sawano
Teruyoshi Yao
Katsuyoshi Kobayashi
Satoru Asai
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Local flare effects and correction in ArF lithography
2003
VLSIT | Symposium on VLSI Technology
Teruyoshi Yao
Morimi Osawa
Takayoshi Minami
N. Yamamoto
Hajime Aoyama
G. Okuda
Toshio Sawano
I. Kamatsuki
F. Sugimoto
Hiroki Futatsuya
Kaoru Kobayashi
Kozo Ogino
Hiromi Hoshino
Yasuhide Machida
Hiroshi Arimoto
Satoru Kawasaki Asai
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