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Skyverse Ltd, Shenzhen, China
Skyverse Ltd, Shenzhen, China
white light
Interference (wave propagation)
Metrology
Optoelectronics
NAND gate
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White Light Interference Solution for Novel 3D NAND VIA Dishing Metrology
2019
Xiao-Ye Ding
Yangtze Memory Technologies Co, ., Ltd, Wuhan, China
Sicong Wang
Yi Zhou
Yan-Zhong Ma
Le Yang
Chi Chen
Skyverse Ltd, Shenzhen, China
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