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Yangtze Memory Technologies Co, ., Ltd, Wuhan, China
Yangtze Memory Technologies Co, ., Ltd, Wuhan, China
Metrology
white light
Interference (wave propagation)
Optoelectronics
NAND gate
2
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Novel Pattern-Centric Solution for XtackingTM AFM Metrology
2019
Sicong Wang
Yangtze Memory Technologies Co, ., Ltd, Wuhan, China
Jian Mi
Abhishek Vikram
Gao Xu
Guojie Chen
LiMing Zhang
Pan Liu
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White Light Interference Solution for Novel 3D NAND VIA Dishing Metrology
2019
Xiao-Ye Ding
Yangtze Memory Technologies Co, ., Ltd, Wuhan, China
Sicong Wang
Yi Zhou
Yan-Zhong Ma
Le Yang
Chi Chen
Skyverse Ltd, Shenzhen, China
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