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Novel Pattern-Centric Solution for XtackingTM AFM Metrology
Novel Pattern-Centric Solution for XtackingTM AFM Metrology
2019
Sicong Wang
Yangtze Memory Technologies Co, ., Ltd, Wuhan, China
Jian Mi
Abhishek Vikram
Gao Xu
Guojie Chen
LiMing Zhang
Pan Liu
Keywords:
Atomic force microscopy
Materials science
Nanotechnology
Metrology
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