Old Web
English
Sign In
Acemap
>
authorDetail
>
Shane Tang
Shane Tang
Nanotechnology
Silicon nitride
Atomic layer deposition
Materials science
1
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Challenges with Industrialization of Atomic Layer Deposition of Silicon Nitride
2014
Dennis Hausmann
Jon Henri
Jim Sims
Kathryn Merced Kelchner
Sathish Janjam
Shane Tang
Show All
Source
Cite
Save
Citations (1)
1