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Marc Biossat
Marc Biossat
STMicroelectronics
Dopant
Analytical chemistry
Materials science
Oxygen
Doping
2
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2
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0
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EnrichedPLUS 72Germanium Tetrafluoride (EnPLUS 72GeF4) and Hydrogen (H2) Mixture for Implanter Performance Improvement
2016
Barry Lewis Chambers
Ying Tang
Steve Bishop
Thomas Morel
Marc Biossat
Joseph D. Sweeney
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Carbon implantation performance improvement by using carbon monoxide (CO) gas on applied materials VIISta HCS implanter
2014
Ying Tang
Jim Dunn
Steve Bishop
Danny Elzer
Joseph D. Sweeney
Thomas Morel
Stephane Courault
Gautier Horellou
Marc Biossat
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