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Gautier Horellou
Gautier Horellou
STMicroelectronics
Oxygen
Doping
Carbon monoxide
Dopant
Monoxide
1
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2
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Carbon implantation performance improvement by using carbon monoxide (CO) gas on applied materials VIISta HCS implanter
2014
Ying Tang
Jim Dunn
Steve Bishop
Danny Elzer
Joseph D. Sweeney
Thomas Morel
Stephane Courault
Gautier Horellou
Marc Biossat
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