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Ying-Yu Chen
Ying-Yu Chen
TSMC
Lithography
Outgassing
Compromise
Extreme ultraviolet
Surface finish
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Balancing lithographic performance and resist outgassing in EUV resists
2013
Proceedings of SPIE
Shu-Hao Chang
Shu-Fang Chen
Ying-Yu Chen
Ming-Chin Chien
Shang-Chieh Chien
Tzu-Lih Lee
Jack J. H. Chen
Anthony Yen
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Citations (4)
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