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Eun-ji Jung
Eun-ji Jung
Samsung
Cobalt
Materials science
Analytical chemistry
Bilayer
Chemical vapor deposition
5
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24
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Formation of highly reliable Cu/low-k interconnects by using CVD Co barrier in dual damascene structures
2011
IRPS | International Reliability Physics Symposium
Hye Kyung Jung
Hyun-Bae Lee
Matsuda Tsukasa
Eun-ji Jung
Jong-Ho Yun
Jong-Myeong Lee
Gil-heyun Choi
Si-Young Choi
Chilhee Chung
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Citations (11)
Highly Scalable PVD/CVD-Cobalt Bilayer Salicidation Technology for sub-50nm CMOSFETs
2006
Jong-Ho Yun
Hyun-Su Kim
Sug-Woo Jung
Eun-ji Jung
Se-Hoon Kim
Byung-hee Kim
Gil-heyun Choi
Sung-tae Kim
U In Chung
Joo-Tae Moon
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Investigation of Ni/Co bilayer salicidation process for sub-40nm gate technology
2005
Microelectronic Engineering
Eun-ji Jung
Sug-Woo Jung
Hyun-Su Kim
Jong-Ho Yun
Seong-hwee Cheong
Byung-hee Kim
Gil-heyun Choi
Sung-tae Kim
U In Chung
Joo-Tae Moon
Byung-Il Ryu
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Citations (8)
Investigation of Chemical Vapor Deposition (CVD)-Derived Cobalt Silicidation for the Improvement of Contact Resistance
2005
Japanese Journal of Applied Physics
Hyun-Su Kim
Jong-Ho Yun
Kwang-jin Moon
Woong-Hee Sohn
Sug-Woo Jung
Eun-ji Jung
Se-Hoon Kim
Nam-Jin Bae
Gil-heyun Choi
Sung-tae Kim
U In Chung
Joo-Tae Moon
Byung-Il Ryu
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Citations (4)
Effect of a noble annealing system on nickel silicide formation
2004
RTP | International Conference on Advanced Thermal Processing of Semiconductors
Sug-Woo Jung
Hyun-Su Kim
Eun-ji Jung
Seong-hwee Cheong
Jong-Ho Yun
Kwan-Jong Roh
Ja-hum Ku
Gil-heyun Choi
Sung-tae Kim
U In Chung
Joo-Tae Moon
Byung-Il Ryu
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