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M. Yu. Shevchenko
M. Yu. Shevchenko
North-Caucasus Federal University
Nitrogen
Atomic ratio
Inorganic chemistry
Ellipsometry
Spectroscopy
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Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
2015
Inorganic Materials
V. A. Tarala
A. S. Altakhov
M. Yu. Shevchenko
D. P. Valyukhov
S. V. Lisitsyn
V. Ya. Martens
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