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C. H. Twu
C. H. Twu
United Microelectronics Corporation
Wafer
Process window
Lithography
Computer science
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Characterization of quartz etched depth and optical density of opaque pattern for the wafer CD behavior on advanced mask
2019
William Chou
Jeffrey Cheng
C. H. Twu
Adder Lee
Chih Hsuan Chao
Xin Ren Yu
Po Tsang Chen
Edgar Huang
Junjin Lin
Sweet Chen
James Cheng
Colbert Lu
Josh Tzeng
Jackie Cheng
Heng-Jen Lee
Young Ham
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Hotspot analysis and empirical correction through mask and wafer technology harmonization
2018
Yohan Choi
William Chou
Hsin-Fu Chou
C. H. Twu
Adder Lee
Colbert Lu
Josh Tzeng
Michael Green
Mohamed Ramadan
Young Ham
Jeffrey Cheng
Chih Hsuan Chao
Jackie Cheng
Sweet Chen
James Cheng
Hong Jen Lee
Chris Progler
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Process window discovery from mask inspection for hotspot analysis and verification
2017
James Cheng
William Chou
C. H. Twu
Hsin-Fu Chou
Jackie Cheng
Colbert Lu
Hong Jen Lee
Bosheng Zhang
Apo Sezginer
David Wu
Albert Chien
Mehdi Daneshpanah
Mike Yeh
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