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J.L Prado
J.L Prado
IMEC
Dielectric
Plasma
Nanotechnology
Monolayer
Composite material
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The Effect of Ar/H2 Plasma Pretreatments on Porous K=2.0 Dielectrics for Pore Sealing by Self-Assembled Monolayers Deposition
2012
Solid State Phenomena
Yiting Sun
Johan Swerts
P. Verdonck
Abhishek Maheshwari
J.L Prado
S. De-Feyter
Silvia Armini
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