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James L. Rolland
James L. Rolland
Ion implantation
Chemistry
Waste management
Doping
Dopant
4
Papers
2
Citations
0
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2024
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In-Situ Ion Source Cleaning: Review of Chemical Mechanisms and Evaluation Data at Production Fabs
2008
Robert Kaim
Steve Bishop
Oleg Byl
David Eldridge
Paul J. Marganski
James J. Mayer
Joseph D. Sweeney
Sharad Yedave
Dieter Fuchs
S. Spreitzer
J. Vogel
Jim Dunn
P. Lundquist
James L. Rolland
T. Romig
D. Newman
M. Mitchell
K. Ditzler
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Manufacturing Assessment of an XeF2 In‐Situ Clean Process for Mitigation of Species Cross Contamination
2008
Jim Dunn
James L. Rolland
Paul Lundquist
Steve Bishop
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Manufacturing Assessment of SDS3® Gas Upgrade
2006
James P. Dunn
James L. Rolland
James S. Grim
Bob Brown
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Qualification of the GASGUARD® SAS GGT Arsine Sub‐Atmospheric Gas Delivery System for Ion Implantation
2006
James P. Dunn
James L. Rolland
James S. Grim
Reinaldo Mario Machado
Christopher L. Hartz
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