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Robert Kaim
Robert Kaim
Infineon Technologies
Ion implantation
Chemistry
Process engineering
Ion beam
Real-time computing
2
Papers
4
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0
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2024
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Decreasing Beam Auto Tuning Interruption Events with In‐Situ Chemical Cleaning on Axcelis GSD
2008
Dieter Fuchs
Stefan Spreitzer
Josef Vogl
Steve Bishop
David Eldridge
Robert Kaim
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Citations (3)
In-Situ Ion Source Cleaning: Review of Chemical Mechanisms and Evaluation Data at Production Fabs
2008
Robert Kaim
Steve Bishop
Oleg Byl
David Eldridge
Paul J. Marganski
James J. Mayer
Joseph D. Sweeney
Sharad Yedave
Dieter Fuchs
S. Spreitzer
J. Vogel
Jim Dunn
P. Lundquist
James L. Rolland
T. Romig
D. Newman
M. Mitchell
K. Ditzler
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