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Nikolay Oleynik
Nikolay Oleynik
GlobalFoundries
Reticle
Wafer fabrication
Optical proximity correction
Engineering drawing
Wafer
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Alternative material to mitigate chrome degradation on high volume ArF layers
2013
Guoxiang Ning
Selvi Gopalakrishnan
Thomas Thamm
Nikolay Oleynik
Paul Ackmann
Remi Riviere
Stephanie Maelzer
Yee Mei Foong
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