Old Web
English
Sign In
Acemap
>
authorDetail
>
Selvi Gopalakrishnan
Selvi Gopalakrishnan
GlobalFoundries
Reticle
Optical proximity correction
Wafer
Electronic engineering
Critical dimension
2
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Laser-written binary OMOG photomasks for high-volume non-critical 193-nm photolithographic layers
2014
Remi Riviere
Selvi Gopalakrishnan
Martin Mazur
Nevzat Öner
Sven Mühle
Rolf Seltmann
Show All
Source
Cite
Save
Citations (0)
Alternative material to mitigate chrome degradation on high volume ArF layers
2013
Guoxiang Ning
Selvi Gopalakrishnan
Thomas Thamm
Nikolay Oleynik
Paul Ackmann
Remi Riviere
Stephanie Maelzer
Yee Mei Foong
Show All
Source
Cite
Save
Citations (0)
1