Old Web
English
Sign In
Acemap
>
authorDetail
>
Pek Beng Ong
Pek Beng Ong
Overlay
Computer science
Process variation
Metrology
Accuracy and precision
2
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
OPO residuals improvement with imaging metrology for 3D NAND
2020
Shlomit Katz
Anna Golotsvan
Yoav Grauer
Efi Megged
Greg Gray
Fiona Leung
Pek Beng Ong
Shi Lei
Jeremy Wei
Wayne (Wei) Zhou
Linfei Gao
Show All
Source
Cite
Save
Citations (1)
Machine learning for modeled-TIS and overlay reduction
2020
Shlomit Katz
Boaz Ophir
Udi Shusterman
Anna Golotsvan
Liran Yerushalmi
Efi Megged
Yoav Grauer
Jian Zhang
Alimei Shih
Shi Ming-wei
Judith Yep
Fiona Leung
Pek Beng Ong
Show All
Source
Cite
Save
Citations (0)
1