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Udi Shusterman
Udi Shusterman
Artificial intelligence
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Computer science
Observational error
Process variation
2
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2024
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Machine learning for Tool Induced Shift (TIS) reduction: an HVM case study
2021
Boaz Ophir
Udi Shusterman
Anna Golotsvan
Cindy Kato
Masanobu Hayashi
Richika Kato
Tomohiro Goto
Taketo Kuriyama
Manabu Miyake
Yasuki Takeuchi
Hiroyuki Mizuochi
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Machine learning for modeled-TIS and overlay reduction
2020
Shlomit Katz
Boaz Ophir
Udi Shusterman
Anna Golotsvan
Liran Yerushalmi
Efi Megged
Yoav Grauer
Jian Zhang
Alimei Shih
Shi Ming-wei
Judith Yep
Fiona Leung
Pek Beng Ong
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