Old Web
English
Sign In
Acemap
>
authorDetail
>
Kristof Marcoen
Kristof Marcoen
IMEC
Inorganic chemistry
Materials science
Chemical engineering
Forming gas
Crystallinity
2
Papers
25
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties
2017
Chemistry of Materials
M. Popovici
Benjamin Groven
Kristof Marcoen
Quan Manh Phung
Shibesh Dutta
Johan Swerts
Johan Meersschaut
Jaap Van den Berg
Alexis Franquet
Alain Moussa
Kris Vanstreels
Pieter Lagrain
Hugo Bender
Malgorzata Jurczak
Sven Van Elshocht
Annelies Delabie
Christoph Adelmann
Show All
Source
Cite
Save
Citations (25)
Impact of the starting surface on the film characteristics of thermal Ru ALD for metal-insulator-metal applications
2014
M. Popovici
Annelies Delabie
Christoph Adelmann
Kristof Marcoen
Benjamin Groven
Johan Swerts
Johan Meersschaut
Alexis Franquet
Augusto Redolfi
Malgorzata Jurczak
Sven Van Elshocht
Show All
Source
Cite
Save
Citations (0)
1