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Gregory M. Bartlett
Gregory M. Bartlett
ASM International
Materials science
Optoelectronics
Chemical vapor deposition
Arrhenius plot
Isothermal process
3
Papers
28
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Process for forming a film on a substrate using multi-port injection assemblies
2018
Joe Margetis
John Tolle
Gregory M. Bartlett
Nupur Bhargava
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Citations (2)
(Invited) Selective Epitaxial Growth of High-P Si:P for Source/Drain Formation in Advanced Si nFETs
2016
Erik Rosseel
Sathish Kumar Dhayalan
Andriy Hikavyy
Roger Loo
Harald Profijt
David Kohen
S. Kubicek
T. Chiarella
Hao Yu
Naoto Horiguchi
D. Mocuta
Kathy Barla
Aaron Thean
Gregory M. Bartlett
Joe Margetis
Nupur Bhargava
John Tolle
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Citations (26)
Efficient Si3H8 Based Deposition Process Suitable for High Throughput Cl2 Based SiCP/SiP Cyclic Deposition and Etch Processes
2012
Matthias Bauer
Matthew G. Goodman
Gregory M. Bartlett
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